93-6127 | 796-801289-001 MKS RIGHT Angle Vacuum Valve

The UHV valve series is rated for service from -20o C to 93o C (standardmanual version, pneumatic version without the optional solenoid operated pilot valve). In the pneumatic version, addition of the optional solenoid pilot valve increases the lower limit to 0oC.Pressure Range :15 psig to 1.0 x 10-9 TorrHelium Leak Rate: 1.0 x 10-9 std cc/secMaximum Bakeout Temp.: 150°C – Body 70°C – CylindeLimit Switch Rating Single Pole, Single Throw: 5A – 250 VAC 5A – 30 VDCBlow-by Pressure:32 psia (2.2 x 105 N/m2 abs)