ULVAC XU-MVS3122 Wafer Robot - Precision Semiconductor Handling
Used

ULVAC XU-MVS3122 Wafer Robot – Precision Semiconductor Handling

Part number XU-MVS3122

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Details and specifications

ULVAC XU-MVS3122 Wafer Robot – Precision Semiconductor Handling

Precision semiconductor handling with high reliability and contamination control

Brand ULVAC
Model XU-MVS3122
Voltage 200V AC
Country of Origin Japan
Weight 200 kg
Dimensions 1500 x 1000 x 1500 mm
Warranty 2 years
Certifications CE, SEMI S2
SKU / MPN XU-MVS3122
What’s in the box Robot arm, controller module, interconnect cables, mounting kit, user manual
Payload Capacity 5 kg
Reach 1000 mm
Number of Axes 4
Repeatability ±0.1 mm
Wafer Size 300 mm
Maximum Speed 2 m/s

Key benefits: Increases yield, reduces downtime, cleanroom compatible, long service life

Typical applications: Wafer transfer, semiconductor fabrication, cleanroom automation

Order number: ULVAC XU-MVS3122 Wafer Robot – Precision Semiconductor Handling

Lifecycle: Active

Documentation: Available on request

At a glance

SKU
XU-MVS3122
Category
Used
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  1. Richard S.

    Solid relay modules, good switching capacity. Perfect for our automation panel.

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